Date of Original Version

1992

Type

Conference Proceeding

Abstract or Description

An electrostatically driven, pneumatic actuator able to generate surface-normal deflections is described. Two sealed, air-filled, concentric chambers that share a membrane and are connected by channels make up the actuator. The portion of the membrane suspended over the outer chamber serves as the movable electrode plate while the conducting substrate acts as the fixed, opposing electrode plate of an electrostatic actuator. When a voltage is applied across the two plates, the outer-chamber membrane deflects towards the substrate, decreasing the volume in the outer chamber. The decreased volume produces a concomitant increase in the pressure in both the outer and inner chamber, causing the membrane over the inner chamber to deflect away from the substrate. The deflection of the membrane over the inner chamber is not only in the opposite direction to the outer membrane deflection, but is also amplified. Prototype surface-normal actuators have been fabricated with inner chamber radii ranging between 100 and 250 μm and outer chamber radii ranging between 200 and 750 μm.

Comments

"©1992 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE." "This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder."

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Published In

Micro Electro Mechanical Systems '92.